A method of manufacturing a physical quantity dete

专利名称：A method of manufacturing a physical

quantity detector utilizing changes inelectrostatic capacitance

发明人：OKADA, Kazuhiro申请号：EP96119715.9申请日：19911011公开号：EP0767363A3公开日：19970702

专利附图：

摘要：A method of manufacturing a physical quantity detector utilizing changes in anelectrostatic capacitance is disclosed. This method comprises the steps of providing a

first substrate (100), a second substrate (200), and a third substrate (400). After a workingregion (110), a flexible region (120) and a fixed region (130) are defined on said firstsubstrate (100), the first substrate (100) and the third substrate (400) are connected, sothat a space is maintained between an upper surface of said first substrate (100) and alower surface of said third substrate. A first electrode layer (E1) is formed on said uppersurface of said first substrate, and a second electrode layer is made on said lower surfaceof said third substrate (400). Said flexible region (120) is partially removed in order toallow said flexible region to have flexibility relative to said working region and said fixedregion. Said second substrate (200) and said first substrate (100) are connected so that anupper surface of said second substrate (200) is connected to a lower surface of said workregion (110) and a lower surface of said fixed region (130). Portions of said secondsubstrate are cut away to form a working body (210) and a pedestal (220).

申请人：OKADA, Kazuhiro

地址：73, Sugaya 4-chome Ageo-shi, Saitama 362 JP

国籍：JP

代理机构：Hirsch, Peter

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