专利名称：METHOD FOR CHANGING A PROCESSING
MEDIUM CONTAINED IN A PROCESSINGTANK AND SYSTEM FOR CARRYING OUTTHE METHOD
发明人：SABET, MOSTAFA申请号：EP99907575.7申请日：19990227公开号：EP1101243A1公开日：20010523
摘要：The invention relates to a method for changing a processing medium for thewet chemical processing of silicon wafers, said processing medium being contained in aprocessing tank (12). According to the invention, a quantity of the contaminatedprocessing medium is extracted and replaced by an equivalent quantity of non-contaminated processing medium at predetermined intervals and/or after apredetermined number of silicon wafers have been processed. Said quantity (ΔV)corresponds to a fraction of the overall quantity (Vmax) of processing medium (14)contained in the processing tank (12). The invention also relates to a system for the wetchemical processing of silicon wafers (16), comprising a processing tank (12), a tanksupply line (26) and a tank discharge line (46). The inventive system is characterised inthat a dosing pump (30, 56) is provided in the tank supply line (26) and in the tank
discharge line (46) and in that a control device (80) is allocated to said dosing pumps. Saidcontrol device (80) enables the processing medium to be extracted from or introducedinto the processing tank.
申请人：SABET, MOSTAFA
地址：Fasanenhofstrasse 123 70565 Stuttgart DE
国籍：DE
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